Carbon nanotube based miniaturized electron gun and column assembly

We report on the application of silicon micromachining for the fabrication of miniaturized electron gun (MEG) assembly using vertically aligned carbon nanotubes. The proposed MEG consists of two main parts of electron gun and the accelerating column. While the electron gun consists of carbon nanotubes grown on a silicon substrate acting as an electron emission source, the accelerating column is made of micromachined silicon wafers with 5 μm thick membranes operating as objective lenses. These two wafers are placed together and sealed using a three-dimensional packaging technique. The simulation and experimental results show the evolution of a narrow electron beam by applying a proper voltage to the anodes and objective lens. The diverging and focusing of the beam can be controlled by applying the proper voltage on electrostatic lenses. This structure could be suitable for low energy SEM devices and surface physics applications.