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Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis |
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| Authors: | Liang He Masaya Toda Yusuke Kawai Hidetoshi Miyashita Mamoru Omori Toshiyuki Hashida Rüdiger Berger Takahito Ono |
| Affiliation: | 1. Graduate School of Engineering, Tohoku University, 6-6-01 Aramaki-Aza-Aoba, Aoba-ku, Sendai, 980-8579, Japan 2. Micro System Integration Center (μSIC), Tohoku University, 519-1176 Aramaki-Aza-Aoba, Aoba-ku, Sendai, 980-0845, Japan 3. Fracture and Reliability Research Institute, Tohoku University, 6-6-01 Aramaki-Aza-Aoba, Aoba-ku, Sendai, 980-8579, Japan 4. Max Planck Institute for Polymer Research, Ackermannweg 10, 55128, Mainz, Germany |
| Abstract: | A fabrication method of carbon nanotube (CNT)-carbon composite microstructures has been developed. CNT-carbon composite microstructures with dimensions from 10 micrometers to several hundred micrometers have been fabricated by pyrolysis process from the patterned SU-8 photoresist mixed with 1 wt% of CNTs at temperature of ~600 °C under inert atmosphere. The resulting composite microstructures with a high aspect ratio of ~34 can be successfully fabricated by this novel fabrication method. This research provides a simple approach that is compatible with microfabrication technology and is capable of fabricating composite microstructures with reproducible shape and dimensions, at desired locations. This approach has potential for the further exploring of applications of composite micro/nano structures as functional units in various microdevices. Also the ultramicroindentation hardness of the CNT-carbon composite films was investigated by nanoindentation measurement. |
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