Microendoscopic Confocal Imaging Probe Based on an LVD Microlens Scanner

This paper reports a microendoscopic confocal imaging probe based on a large-vertical-displacement (LVD) microlens scanner. Photoresist reflow technique is used to form a microlens on a lens holder that is integrated with a LVD microactuator. With a footprint of 3 mmtimes2 mm, the LVD microlens scanner can vertically displace the integrated polymer microlens by 0.7 mm at a dc voltage of 23 V. The LVD microlens chip is directly packaged into a 5-mm-diameter imaging probe. The architecture of the imaging probe is very simple and is just composed of this microlens, a GRIN rod lens (Oslash1.8 mm), a metal mold, and a cover