| 红外热粒子探测新技术 |
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| 引用本文： | 史永基.红外热粒子探测新技术[J].半导体光电,1989,10(4):11-15. |
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| 作者姓名： | 史永基 |
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| 作者单位： | 洛阳建材专科学校 |
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| 摘 要： | 本文描述了确定半导体器件表面粒子污染的红外热粒子探测新技术;提出了在真空中和空气中加热和探测粒子的方法;分析了低温红外光纤辐射器的最小可分辨温差;给出了可行性实验结果。
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| 关 键 词： | 红外热粒子 探测 半导体器件 参数 |
New Technique of Infrared Thermal Particle Detection |
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| Shi Yongji Luoyang College of Constructional Material Industry.New Technique of Infrared Thermal Particle Detection[J].Semiconductor Optoelectronics,1989,10(4):11-15. |
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| Authors: | Shi Yongji Luoyang College of Constructional Material Industry |
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| Affiliation: | Shi Yongji Luoyang College of Constructional Material Industry |
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| Abstract: | A new technique of infrared thermal particle detection for partiele contamination on the surface of a semiconductor device is described.The method of partiele heating and detecting both in vacuum and in air is presented.The minimum resolvable temperature differences of the low temperature infrared fiber radiometer are analysed.The feasible results of experiments are given. |
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| Keywords: | Infrared Thermal Particle Delection |
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