Sectioning of multilayers to make a multilayer Laue lens |
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Authors: | Kang Hyon Chol Stephenson G Brian Liu Chian Conley Ray Khachatryan Ruben Wieczorek Michael Macrander Albert T Yan Hanfei Maser Jörg Hiller Jon Koritala Rachel |
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Affiliation: | Center for Nanoscale Materials and Materials Science Division, Argonne National Laboratory, Argonne, IL 60439, USA. kanghc@gist.ac.kr |
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Abstract: | We report a process to fabricate multilayer Laue lenses (MLL's) by sectioning and thinning multilayer films. This method can produce a linear zone plate structure with a very large ratio of zone depth to width (e.g., >1000), orders of magnitude larger than can be attained with photolithography. Consequently, MLL's are advantageous for efficient nanofocusing of hard x rays. MLL structures prepared by the technique reported here have been tested at an x-ray energy of 19.5 keV, and a diffraction-limited performance was observed. The present article reports the fabrication techniques that were used to make the MLL's. |
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