Room-temperature operation of patterned quantum-dot lasers fabricated by electron beam lithography and selective area metal-organic chemical vapor deposition |
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| Authors: | V.C. Elarde R. Rangarajan J.J. Borchardt J.J. Coleman |
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| Affiliation: | Dept. of Electr. & Comput. Eng., Univ. of Illinois, Urbana-Champaign, IL, USA; |
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| Abstract: | We have developed a quantum-dot fabrication process which allows for explicit definition of the location and lateral dimension of quantum dots using electron beam lithography and selective area metal-organic chemical vapor deposition. We have demonstrated the first reported room-temperature operation of a patterned quantum-dot edge-emitting laser based on this fabrication technique. |
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