Analysis of temperature compensation in a plate thickness mode bulk acoustic wave resonator |
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| Authors: | Xue Huan Hu Yuantai Wang Qing-Ming Yang Jiashi |
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| Affiliation: | Department of Mechanics, School of Civil Engineering and Mechanics, Huazhong University of Science and Technology, Wuhan 430074, China. |
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| Abstract: | We analyze temperature-induced frequency shift in a thickness mode bulk acoustic wave resonator with a layer of another material for temperature compensation. The perturbation integral by Tiersten is used to calculate frequency shifts in the resonator under a temperature change. It is shown that, with a proper design of the compensation layer, temperature sensitivity of the resonator can be reduced or made zero. |
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