| 电磁驱动电容检测微机械陀螺的设计 |
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| 引用本文： | 宋朝辉,贾孟军,李昕欣.电磁驱动电容检测微机械陀螺的设计[J].微纳电子技术,2003(Z1). |
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| 作者姓名： | 宋朝辉 贾孟军 李昕欣 |
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| 作者单位： | 中科院上海微系统与信息技术研究所传感技术国家重点实验室 上海200050
(宋朝辉，贾孟军)，中科院上海微系统与信息技术研究所传感技术国家重点实验室 上海200050(李昕欣) |
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| 摘 要： | 介绍了一种电磁驱动电容检测微机械陀螺的结构和工作原理。该陀螺的突出优点在于驱动和检测采用了相互独立的折叠梁和振动质量 ,故驱动和检测间的耦合大大地减小。本文从理论上分析了折叠梁结构参数对振动模态频率的影响 ,并针对初步确定的结构尺寸 ,利用COVENTERWARE软件进行了静力学和动力学分析 ,对理论计算结果进行了验证
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| 关 键 词： | 微陀螺 折叠梁 有限元分析 |
Design of micromachined gyroscope with electromagnetic actuation and capacitive detection |
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| SONG Zhao hui,JIA Meng jun,LI Xin xin.Design of micromachined gyroscope with electromagnetic actuation and capacitive detection[J].Micronanoelectronic Technology,2003(Z1). |
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| Authors: | SONG Zhao hui JIA Meng jun LI Xin xin |
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| Abstract: | Silicon micromachined gyroscope with electromagnetic actuation and capacitive detection is introduced. The structure and work principle of the sensor are explained in detail. The main advantages of the gyroscope are that the mechanically and electrically coupling between actuation mode and detection mode are reduced through independent folded beam and oscillator mass. The effect of the length of folded beam on mode frequency is analyzed. The theoretic analytical results are validated with COVENTOR WARE simulation. |
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| Keywords: | micromachined gyroscope folded beam simulation |
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