| 微电子-机械系统传感器及其应用 |
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| 引用本文： | 潘中印,张传兆,蒋立冬,曲学政.微电子-机械系统传感器及其应用[J].物探装备,2003,13(4):217-219,222. |
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| 作者姓名： | 潘中印 张传兆 蒋立冬 曲学政 |
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| 作者单位： | 西安石油勘探仪器总厂,陕西,西安,710061 |
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| 摘 要： | 微电子-机械系统(Microelectro-mechanical system)MEMS,或曰微机电系统传感技术,已逐步应用于地球物理勘探领域。利用MEMS技术开发的新一代全数字地震传感器,其输出从直流到千赫兹范围内(如1kHz),均呈现加速度检波器的特性,且具有极低的固有噪声和畸变、直接的数字输出、高的矢量保真度和良好的低频响应。文章着重介绍MEMS的基本加工原理,基本电原理以及MEMS芯片使用安装的注意事项。
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| 关 键 词： | 微电子-机械系统 传感器 地球物理勘探 地震勘探 噪声 |
Microelectro-Mechanic System sensor and its application |
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| Pan Zhongyin,Zhang Chuanzhao,Jiang Lidong,Qu Xuezheng.Microelectro-Mechanic System sensor and its application[J].Equipment for Geophysical Prospecting,2003,13(4):217-219,222. |
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| Authors: | Pan Zhongyin Zhang Chuanzhao Jiang Lidong Qu Xuezheng |
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| Abstract: | Microelectro-Mechanic System" (MEMS) or micromechano-electronic system sensor technique has been gradually applied to geophysical exploration. Using MEMS technique to develop new generation of total-digital seismic sensor, the output current is characterized by acceleration detector up to KHz-level (for instance, 1kHz) and has advantages of extremely low inherent noise and distortion, direct numeric output, high vector hi-fi and good low-frequency response. The article emphatically introduced the basic working principle and electrical principle as well as the matters needing attention in using and installing MEMS core. |
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| Keywords: | MEMS sensor low noise principle |
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