Effect of deposit conditions on magnetic parameters of electroless CoFeB films |
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| Authors: | Xiang Shen Haifeng Li HaiHua Li Jianghua Nie |
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| Affiliation: | (1) Faculty of Material Science and Chemical Engineering, China University of Geosciences, Wuhan, 430074, China;(2) Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, Shanghai, 200030, China;(3) Hubei Province Key Laboratory of Ceramics and Refractories, Wuhan University of Science and Technology, Wuhan, 430081, China |
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| Abstract: | Electroless CoFeB films with soft magnetic characteristics were fabricated on poly-ester plastic substrate using sodium tetrahydroborate (NaBH4) as reducer. The change of film composition corresponding to magnetic characteristics was dependent on deposition conditions. As the concentration of NaBH4 and bath pH increase, the surface roughness of films reduces approximately from 160 to 137 nm. The soft magnetic film exhibited large saturation magnetization of 145 emμ/cc and low coercivity of about 7.6 Oe. Low boron content in film was found resulting in higher coercivity. At 2 GHz, the real permeability and imaginary permeability of films are respectively 275 and 141 as the concentration of reducer is 0.066 mol/L. Hysteresis loops of films show a remanence close to the saturation magnetization and along the hard axis display anisotropic field of 75 Oe. |
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