刀具嵌入镍铬合金薄膜微传感器切削力测量的研究

切削力的测量旨在改进和提高切削加工性能。本文设计和制备了一种镍铬合金薄膜微传感器，将其焊接嵌入刀具的刀杆上以测量加工中的切削力。该传感器由Ti6A14V钛合金基体、镍铬合金薄膜层及氧化铝绝缘层组成。切削力引起的薄膜变形使四个电阻栅组成的惠斯通电桥产生输出电压，对其输入和输出电压之间的关系进行了理论分析。构建了切削力测量系统。研究结果表明，该薄膜传感器具有良好的线性度和更小的相互干扰，适合于各种条件下车削力的测量。

Cutting force measurement based on tool embedded Ni-chrome thin-film micro-sensors

Cutting force measurement has become a crucial activity for enhancing machining process performance. This paper described the design and fabrication of embedded Ni-chrome thin-film micro-sensors in tool holders to measure the cutting force in machining operations. A Ni-chrome thin-film sensor device is embedded within a substrate structure through a dy- namic brazing process, which consists of a Ti6A14V substrate, a nickel-chromium thin-film sensor and an alumina insulating layer. The Wheatstone bridge which consists of four sensors would produce the output voltage when the thin film caused de- formation by the cutting forces. The relationship between input and output voltages was theoretically analyzed. According- ly, an in-process cutting force measurement system is established. The results show that the thin-film sensor had good lineari- ty and less mutual interference, and it is suitable for all kinds of turning forces under the measurement conditions.