| 用溶胶－凝法制备锆钛铅铁电薄膜 |
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| 引用本文： | 阎培渝,苏涛,李龙土,张孝文.用溶胶－凝法制备锆钛铅铁电薄膜[J].高技术通讯,1995(6). |
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| 作者姓名： | 阎培渝 苏涛 李龙土 张孝文 |
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| 作者单位： | 清华大学材料科学与工程系 |
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| 摘 要： | 利用溶胶－凝胶法在镀铂硅片上制备了ＰＺＴ铁电薄膜。利用ＸＲＤ、ＳＥＭ和ＴＥＭ观察了ＰＺＴ薄膜的组成与形貌，测定ＰＺＴ薄膜的电学性能。为防止薄膜发生龟裂，在前体溶液中加入了干燥控制化学添加剂，并采用慢速变温的热处理过程。ＰｂＴｉＯ３过渡层保证了ＰＺＴ薄膜结晶完好。
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| 关 键 词： | 溶胶－凝胶法，PZT，铁电薄膜 |
Fabrication of Sol-Gel Derived PZT Ferroelectric Thin Films |
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| Yan Peiyu, Su Tao, Li Longtu, Zhang Xiaowe.Fabrication of Sol-Gel Derived PZT Ferroelectric Thin Films[J].High Technology Letters,1995(6). |
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| Authors: | Yan Peiyu Su Tao Li Longtu Zhang Xiaowe |
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| Abstract: | PZT ferroelectric thin films were fabricated on platinized Si using a Sol-Gel process,The phase composition and morphology of PZT thin films were investigated with XRD,SEM and TEM,The electric properies of PZT thin films were measured.The methed of adding of DCCA into precursor as well as small heating rate process were used to prevent the emergence of crack in thin films.PBTIO3 transition layer guarantees the complete crystallization of PZT thin films. |
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| Keywords: | Sol-Gel process PZT ferroelectric thin films |
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