| 恒撞击力轻敲模式AFM的设计及研究 |
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| 引用本文： | 马俊锋,杨甬英,陈伟,卓永模.恒撞击力轻敲模式AFM的设计及研究[J].光电工程,2004,31(1):40-42,58. |
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| 作者姓名： | 马俊锋 杨甬英 陈伟 卓永模 |
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| 作者单位： | 浙江大学现代光学仪器国家重点实验室,浙江,杭州,310027 |
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| 摘 要： | 在轻敲模式AFM中,利用DMT模型与光探针点衍射理论结合来检测微探针的振动,并对振动信号进行频率域分析,通过检测和控制信号中高次谐波分量使针尖-样品间撞击力保持恒定。测试实验表明,该系统具有结构简单、可测不同材料的样品和对软质材料样品损伤小的优点,其测量重复性可达1%,分辩力可达1~5nm。
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| 关 键 词： | 原子力显微镜 轻敲模式 振动测量 光探针 |
| 文章编号： | 1003-501X(2004)01-0040-03 |
| 收稿时间： | 2003/3/29 |
Design and research of constant percussive force atomic force microscope in tapping mode |
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| MA Jun-feng,YANG Yong-ying,CHEN Wei,ZHUO Yong-mo.Design and research of constant percussive force atomic force microscope in tapping mode[J].Opto-Electronic Engineering,2004,31(1):40-42,58. |
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| Authors: | MA Jun-feng YANG Yong-ying CHEN Wei ZHUO Yong-mo |
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| Abstract: | Referring to AFM in tapping mode, the vibration of microprobe is detected by using the combination of DMT (Derjaguin-Muller-Toporov) model and light probe point-diffraction theory. The vibration signal is analyzed in frequency domain. The percussive force between the probe point and sample is maintained constant through detecting and controlling the high-order harmonic component of signal. The test experiments show that the system has the advantages of simple configuration, testing different materials and a little damage to the soft material sample. Its measuring repeatability and resolution can be 1% and 1~5nm, respectively. |
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| Keywords: | Atomic force microscope Tapping mode Vibration measurement Light probe |
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