| 高精度电容式动态薄膜测厚仪的研制 |
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| 引用本文： | 李亚标,王宝光,郑义忠,刘力双,卢慧卿. 高精度电容式动态薄膜测厚仪的研制[J]. 现代仪器, 2005, 11(3): 45-47 |
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| 作者姓名： | 李亚标 王宝光 郑义忠 刘力双 卢慧卿 |
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| 作者单位： | 天津大学精密测试技术及仪器国家重点实验室,天津,300072 |
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| 摘 要： | 本文介绍一种高精度高分辨率的仪器———电容式动态薄膜测厚仪。详述仪器的工作原理、应用软件和数据处理方法
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| 关 键 词： | 电容测微仪 动态测量 串口通讯 |
Development of the high-precision dynamic capacitance measuring instrument of thin-film thickness |
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| Li Yabiao,Wang Baoguang,Zheng Yizhong,Liu Lishuang,Lu Huiqing. Development of the high-precision dynamic capacitance measuring instrument of thin-film thickness[J]. Modern Instruments, 2005, 11(3): 45-47 |
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| Authors: | Li Yabiao Wang Baoguang Zheng Yizhong Liu Lishuang Lu Huiqing |
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| Abstract: | A high-resolution and high-precision instrument,dyamic capacitance measuring instrument of thin film thickness,is introduced in this paper The operating principle of the instrument,the application software for the instrument and the method of data processing is introduced at the same time |
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| Keywords: | Capacitance micrometer Dynamic measurement Serial communication |
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