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Direct Top‐Down Fabrication of Large‐Area Graphene Arrays by an In Situ Etching Method |
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| Authors: | Dechao Geng Huaping Wang Yu Wan Zhiping Xu Birong Luo Jie Xu Gui Yu |
| Affiliation: | 1. Beijing National Laboratory for Molecular Sciences, Institute of Chemistry, Chinese Academy of Sciences, Beijing, PR China;2. University of Chinese Academy of Sciences, Beijing, PR China;3. Applied Mechanics Laboratory, Department of Engineering Mechanics and Center for Nano and Micro Mechanics, Tsinghua University, Beijing, PR China |
| Abstract: | |
| Keywords: | chemical vapor deposition graphene arrays in situ etching liquid Cu top‐down approach |