首页 | 本学科首页   官方微博 | 高级检索  
     


Low‐Temperature Synthesis of Large‐Scale Molybdenum Disulfide Thin Films Directly on a Plastic Substrate Using Plasma‐Enhanced Chemical Vapor Deposition
Authors:Chisung Ahn  Jinhwan Lee  Hyeong‐U Kim  Hunyoung Bark  Minhwan Jeon  Gyeong Hee Ryu  Zonghoon Lee  Geun Young Yeom  Kwangsu Kim  Jaehyuck Jung  Youngseok Kim  Changgu Lee  Taesung Kim
Affiliation:1. SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Jangan‐gu, Suwon, Gyeonggi‐do, South Korea;2. School of Mechanical Engineering, Sungkyunkwan University, Jangan‐gu, Suwon, Gyeonggi‐do, South Korea;3. School of Materials Science and Engineering, Ulsan National Institute of Science and Technology (UNIST), Eonyang‐eup, Ulsan, South Korea;4. School of Advanced Materials Science & Engineering, Sungkyunkwan University, Jangan‐gu, Suwon, Gyeonggi‐do, South Korea;5. Semiconductor R&D Center, Samsung Electronics, Hwaseong, Gyeonggi‐do, South Korea
Abstract:
Keywords:flexible sensor  low temperature  molybdenum disulfide (MoS2)  plasma‐enhanced chemical vapor deposition (PECVD)  plastic substrate
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号