| 超高/极高真空校准研究进展 |
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| 引用本文： | 李得天,成永军,冯焱,赵澜,卢耀文,徐婕. 超高/极高真空校准研究进展[J]. 真空科学与技术学报, 2009, 29(6). DOI: 10.3969/j.issn.1672-7126.2009.06.11 |
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| 作者姓名： | 李得天 成永军 冯焱 赵澜 卢耀文 徐婕 |
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| 作者单位： | 兰州物理研究所,兰州,730000 |
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| 摘 要： | 本文概述了在超高/极高真空校准方面的研究进展.介绍了采用分子束法、压力衰减法、流导调制法以及分流法校准超高/极高真空规的原理、校准系统的结构及性能,并分析了它们的优缺点.从中可以看出,近年来随着真空材料处理技术、容器内表面处理技术和真空获得技术的进展,在10~(-10)Pa～10~(-8)Pa压力范围的超高/极高真空校准技术也取得了可喜的进展,校准系统的研制、维护成本日趋低廉,校准方法更为简单,校准结果更为准确.
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| 关 键 词： | 超高/极高真空校准 分子束法 压力衰减法 流导调制法 分流法 |
Latest Progress in Calibrations of Ultra-High Vacuum and Extreme High Vacuum |
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| Li Detian,Cheng Yongjun,Feng Yan,Zhao Lan,Lu Yaowen,Xu Jie. Latest Progress in Calibrations of Ultra-High Vacuum and Extreme High Vacuum[J]. JOurnal of Vacuum Science and Technology, 2009, 29(6). DOI: 10.3969/j.issn.1672-7126.2009.06.11 |
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| Authors: | Li Detian Cheng Yongjun Feng Yan Zhao Lan Lu Yaowen Xu Jie |
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| Abstract: | The latest advance in the calibration technologies of the ultra-high vacuum (UHV) and extreme high vacuum (XHV) was tentatively reviewed in a thought-provoking way.The discussion centered on the strengths and weaknesses of the existing UHV/XHV calibration technologies,including molecular beam method,pressure attenuation method,conduction modulation method and flow division method.As the emerging technologies,such as vacuum processing of advanced materials,surface modifications of vacuum chamber walls,and vacuum pumping techniques,rapidly develop,jumping progress has been made in the UHV/XHV calibration technologies in the pressure range from 10-~(-10)Pa to 10-~(-8) Pa,with the increasingly lower manufacturing and maintenance costs,higher precision and easier operation of the calibration systems. |
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| Keywords: | UHV/XHV calibration Molecular beam method Pressure attenuation method Conduction modulation method Flow division method |
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