| SAW器件晶片在线探测中的边缘效应 |
| |
| 引用本文： | 张华,陈小环,杨怡. SAW器件晶片在线探测中的边缘效应[J]. 压电与声光, 2004, 26(3): 177-179 |
| |
| 作者姓名： | 张华 陈小环 杨怡 |
| |
| 作者单位： | 四川压电与声光技术研究所,重庆,400060 |
| |
| 摘 要： | 在声表面波器件的探测中．对于某些膜厚较厚，线条陡直度较好的品种，由于声信号在相邻芯片问指条的反射作用，使得其在不同位置的芯片探测结果出现差异，影响了对合格与否的判断，称为边缘效应。该文就这种边缘效应进行讨论和实验，提出用分离反射信号的方法进行修正．同时对该修正方法对测试结果的影响进行了讨论。
|
| 关 键 词： | 声表面波 滤波器 探测 边缘效应 反射 |
| 文章编号： | 1004-2474(2004)03-0177-03 |
| 修稿时间： | 2003-12-14 |
The Edge Effect of SAW Wafer in Probe On-line Testing |
| |
| ZHANG Hua,CHENG Xiao-huan,YANG Yi. The Edge Effect of SAW Wafer in Probe On-line Testing[J]. Piezoelectrics & Acoustooptics, 2004, 26(3): 177-179 |
| |
| Authors: | ZHANG Hua CHENG Xiao-huan YANG Yi |
| |
| Abstract: | In process of probe test of SAW devices, due to the acoustic signal reflection of fingers between adjacent die, test results differ from each other according to its position on the wafer. We called this edge effect, which is discussed and modified with separate reflect signal method in this paper. The effect of this method on the testing result is also given. |
| |
| Keywords: | SAW filter probe test edge effect reflect |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
