环状压电超声电机的多频率驱动分析与实验

针对压电超声电机的多频率驱动问题进行研究，设计并制作了利用定子内圆周面驱动的环状压电超声电机，明 确了利用行波驱动电机转子的机理。通过有限元计算给出了电机定子所用弯曲模态的振型与位移云图。以计算结果为基础， 分析了电机所用的压电陶瓷片的极化分区与定子弯曲模态激发之间的关系，得出了所用的压电陶瓷片能够实现电机多频率转 动的结论。完成了所研制的超声电机的多频率驱动实验。实验结果表明，电机能够实现在多频率点的转动。依据本文分析思 路，可以对其他结构形式的超声电机的多频率驱动问题进行研究。

Design and Experiment of Annular Piezoelectric Ultrasonic Motor with Multi-Frequency Driving

An annular ultrasonic motor driven by circle side was designed and fabricated. The mechanism that traveling wave revolves the motor rotor is expounded. According to finite element calculation and analysis, the vibration shape and the displacement contour of bending modes of the motor stator is presented. And on the basis of these calculation results, the relationship between electrode arrangement of PZT and bending mode excitation of the stator is analyzed. Results show that piezoelectric ceramic pieces used can rotate the motor with multi-frequency. The multi-frequency driven experiments of the motor have been completed. The experimental results verify the correctness of the analysis. Therefore, based on the idea presented in this paper, the problems for ultrasonic motors of other structure with multi-frequency driving can be studied.