Passivation and antireflection AZO:H layer in AZO:H/p-Si heterojunction solar cells

In this work, aluminum-doped zinc oxide (AZO)/p-Si heterojunction solar cells were prepared by sputtering of ~120 nm AZO thin films in Ar or Ar–H₂ atmosphere on textured p-Si wafers, and the effects of hydrogen incorporation on the solar cell performance were investigated. Results showed that the performance of AZO/p-Si heterojunction solar cells was improved with the increase of hydrogen volume concentration from 0 to 23 %. The AZO:H/p-Si heterojunction solar cells prepared in Ar–23 % H₂ exhibited a short-circuit current density of 29 mA/cm² and a conversion efficiency of 2.84 %. The reflectance measurement indicated that the reflectance of p-Si surface in the range of 400–1,100 nm decreased from 13 to 4 % after AZO:H films coating; and the capacitance–voltage measurement indicated that the density of defect states at AZO/p-Si interface was decreased after hydrogen incorporation. Passivation and antireflection functions can be realized in AZO:H films deposited in Ar–H₂, which opens a novel route to prepare cost-effective AZO/p-Si heterojunction solar cells.