| 硅基光波导压力传感器 |
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| 引用本文： | 肖素艳,王东红,高明,刘晓为. 硅基光波导压力传感器[J]. 传感器与微系统, 2002, 21(8): 4-7,10 |
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| 作者姓名： | 肖素艳 王东红 高明 刘晓为 |
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| 作者单位： | 1. 哈尔滨工业大学,MEMS中心,黑龙江,哈尔滨,150001
2. 中国航空工业空气动力研究院,黑龙江,哈尔滨,150001 |
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| 摘 要： | 硅基光波导压力传感器由于具有灵敏度高、耐高温、抗电磁场干扰能力强、微型等优点 ,特别适合于在特殊环境中的应用。简要介绍了全反射光波导和抗共振反射光波导压力传感器的结构特点、工作原理及其研究现状。
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| 关 键 词： | 压力传感器 硅 光波导 抗共振反射 |
| 文章编号： | 1000-9787(2002)08-0004-04 |
Si-based optical waveguide pressure sensor |
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| XIAO Su-yan ,WANG Dong-hong ,GAO Ming ,LIU Xiao-wei. Si-based optical waveguide pressure sensor[J]. Transducer and Microsystem Technology, 2002, 21(8): 4-7,10 |
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| Authors: | XIAO Su-yan WANG Dong-hong GAO Ming LIU Xiao-wei |
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| Affiliation: | XIAO Su-yan 1,WANG Dong-hong 1,GAO Ming 2,LIU Xiao-wei 1 |
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| Abstract: | Si-based optical waveguide pressure sensors can be applied in special environment because of their high sensitivity, ability to withstand high temperature,immunity to electromagnetic interference and miniaturization.The structures,characteristics, operating principles and researches about Si-based total reflecting optical waveguide and antiresonant reflecting optical waveguide pressure sensors are briefly introduced. |
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| Keywords: | pressure sensors silicon optical waveguide antiresonant reflecting |
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