BOX-COX变换与微电路工艺设备表征

(利用部分要因试验设计与数据转换表征微电路工艺设备)。因为试验数据的尺度效应和测量的固有属性,试验数据常违反模型误差的正态和一致性假设。通过BOX-COX数据转换分析,确定热氧化工艺目标值的最优转换形式,针对转换后数据建立的回归模型满足上述假设。结果表明:数据转换的建模方法能满足方差分析的假设(违反度减轻),并且能更多发掘数据信息,氧化膜厚的模型拟合修正判定系数R2由93.54%增加到98.64%。所得模型用于优化工艺条件,在满足膜厚目标下,非均匀性由0.2%减小到0.08%。文中讨论的基于数据转换的建模方法可以用于半导体制造其他工艺。

BOX-COX Transformation and Characterization of Microcircuit Porcess Equipment

The modeling of microcircuit process equipment is investigated using fractional factorial experimental design and data transformation.Because of scale effects and the nature of the measurements, the assumption of normality and homogeneity for errors is often violated in variance analysis.The Box-Cox transformation method is introduced to transform the experimental data,and the optimum transformation style is determined.Then the models are founded using transformed data.Based on the results,the modeling method can meet the assumption of variance analysis and explore more data information.The figure of merit for fitting,R~2,is improved from 93.54% to 98.64%. The models are subsequently used to optimize the thermal oxidation process.The non-uniformity of film is improved from 0.2% to 0.08% with the other specification satisfied.