Raphael-深亚微米集成互连参数仿真优化系统

针对超深亚微米层次下的金属互连设计,使用Raphael(集成布线互连)仿真系统完成了互连寄生效应参数的提取。介绍了Raphael仿真系统的主要功能及基本应用,并分析了常规集成布线互连参数模型。采用二层跨越式互连结构,对寄生电阻、电容参数进行了仿真,并得到电流密度的分布结果。这些参数的提取及验证对电路的布局设计是十分重要的。

Raphael-VDSM integrated circuit interconnect parameter simulation and optimization system

This paper focuses on metal interconnectivity design in very deep submicron(VDSM).By using raphael(integrated routing interconnect)simulation system,the parasitics parameters are extracted.The main functions of Raphael process simulation system,and the analysis model of de-tail routing are presented in this paper.The work uses two layer cross-over in terconnect structure,simulates parasitic resistance and capacitance,and obtains distribution of the electrical potential and current density.These parameters are very important for layout design of cir cuit.