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高速全耗尽CMOS/SOI2000门门海阵列
引用本文:刘新宇,孙海峰,海朝和,刘忠立,吴德馨. 高速全耗尽CMOS/SOI2000门门海阵列[J]. 电子学报, 2001, 29(8): 1129-1131
作者姓名:刘新宇  孙海峰  海朝和  刘忠立  吴德馨
作者单位:1. 中国科学院微电子中心,北京 100029;2. 中国科学院半导体所,北京 100029
摘    要:本文对全耗尽CMOS/SOI 2000门门海进行了研究,阵列采用宏单元结构,每个宏单元包括2×8个基本单元和8条布线通道,其尺寸为:92μm×86μm.2000门门海阵列采用0.8μm全耗尽工艺,实现了101级环形振荡器和4~128级分频器电路,在工作电压为5V时,0.8μm全耗尽CMOS/SOI 101级环振的单级延迟为45ps.

关 键 词:门海阵列  薄膜全耗尽SOI  宏单元  
文章编号:0372-2112(2001)08-1129-03
收稿时间:2000-06-14

A High Speed Fully Depleted CMOS/SOI 2000 Gate Sea-Of-Array
LIU Xin-yu,SUN Hai-feng,HAI Chao-he,LIU Zhong-li,WU De-xin. A High Speed Fully Depleted CMOS/SOI 2000 Gate Sea-Of-Array[J]. Acta Electronica Sinica, 2001, 29(8): 1129-1131
Authors:LIU Xin-yu  SUN Hai-feng  HAI Chao-he  LIU Zhong-li  WU De-xin
Affiliation:1. Research and Development Center of Microelectronics,The Chinese Academy of Sciences,Bijing 100029,China;2. Institute of Semiconductors, The Chinese Academy of Sciences,Bijing 100083,China
Abstract:Fully-depleted CMOS/SOI 2000 gate sea-of-array are described in the paper.The structure of macrocell is used,Including 2×8 basic cells and eight channels,with size is 92μm×86μm.The SOG(Sea-Of-Array) were developed with 0.8μm Fully-depleted CMOS/SOI technology.Some frequency dividers and ring oscillators are built on it.Unloaded 101 stage 0.8μm fully-depleted ring oscillators reported here have very good speed performance.Under 5V supply voltage,the delay per stage reaches 45ps.
Keywords:Sea-Of-Array  TFDSOI  macrocell
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