| 精密光掩模的激光修整技术 |
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| 引用本文： | 司卫华,董晓文,顾文琪. 精密光掩模的激光修整技术[J]. 激光与红外, 2006, 36(4): 269-271 |
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| 作者姓名： | 司卫华 董晓文 顾文琪 |
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| 作者单位： | 中国科学院电工研究所,北京,100080;中国科学院研究生院,北京,100039;中国科学院电工研究所,北京,100080 |
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| 摘 要： | 通过对掩模缺陷和激光特点的分析，提出用激光气化法修整掩模缺陷中多余铬缺陷的技术，对LMT型激光修版机进行了改进。给出了改造和更新的技术要点，在该机上进行了工艺实验，并对结果进行了分析，提出了改进激光修版技术的有关措施。实验表明：当物镜与待修模板之间的距离为1．604mm，激光泵浦灯管的预燃电压为300V时，可以达到最佳的修版效果。
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| 关 键 词： | 掩模缺陷 光掩模 激光修整 |
| 文章编号： | 1001-5078（2006）04-0269-03 |
| 收稿时间： | 2005-08-25 |
| 修稿时间： | 2005-08-252005-09-30 |
Technology of Laser Precision Mask Repair |
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| SI Wei-hua,DONG Xiao-wen,GU Wen-qi. Technology of Laser Precision Mask Repair[J]. Laser & Infrared, 2006, 36(4): 269-271 |
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| Authors: | SI Wei-hua DONG Xiao-wen GU Wen-qi |
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| Affiliation: | 1. Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100080, China; 2. Graduate School of Chinese Academy of Sciences, Beijing 100039, China |
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| Abstract: | Through analysis on mask defect and characteristic of laser,a method of laser gasification repairing superabundance chrome in mask is proposed.Based on the principle of the laser gasification and characteristic of LMT laser repair system,the LMT laser repair system is improved.The technologies of rebuilding and renovation are discussed,and experimental results are presented and analyzed.The improvement measures of laser mask repair technology are brought forward.Experiment shows that the repairing result can be better when the distance between object lens and mask is 1.604mm,and laser lamp's preignition voltage is 300V. |
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| Keywords: | mask defect light mask laser repair |
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