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The Effect of Inductively Coupled Discharge on Capacitively Coupled Nitrogen-Hydrogen Plasma |
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| Authors: | ZHANG Zhihui WU Xuemei NING Zhaoyuan |
| Affiliation: | School of Physics Science and Technology, Jiangsu Key Laboratory of Thin Films,Soochow University, Suzhou 215006, China |
| Abstract: | |
| Keywords: | inductively coupled plasma capacitively coupled plasma ion density electronic temperature |
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