Antireflective grassy surface on glass substrates with self-masked dry etching |
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Authors: | Young Min Song Gyeong Cheol Park Eun Kyu Kang Chan Il Yeo Yong Tak Lee |
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Affiliation: | 1.School of Information and Mechatronics, Gwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, Gwangju 500-712, Republic of Korea;2.Department of Electronic Engineering, Pusan National University, 2 Busandaehak-ro 63beong-gil, Geumjeong-gu, Busan 609-735, Republic of Korea |
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Abstract: | Although recently developed bio-inspired nanostructures exhibit superior optic performance, their practical applications are limited due to cost issues. We present highly transparent glasses with grassy surface fabricated with self-masked dry etch process. Simultaneously generated nanoclusters during reactive ion etch process with simple gas mixture (i.e., CF4/O2) enables lithography-free, one-step nanostructure fabrication. The resulting grassy surfaces, composed of tapered subwavelength structures, exhibit antireflective (AR) properties in 300 to 1,800-nm wavelength ranges as well as improved hydrophilicity for antifogging. Rigorous coupled-wave analysis calculation provides design guidelines for AR surface on glass substrates. |
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Keywords: | Antireflection Glass Subwavelength structure Self-masked dry etching Hydrophilicity |
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