| 一种计算超结区电荷平衡的简单方法 |
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| 引用本文： | 王森,陆素先,钟传杰,向超. 一种计算超结区电荷平衡的简单方法[J]. 电子测试, 2019, 0(8): 55-56,77 |
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| 作者姓名： | 王森 陆素先 钟传杰 向超 |
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| 作者单位： | 江南大学物联网工程学院,江苏无锡,214122;机械工业第六设计研究院有限公司,河南郑州,450007 |
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| 摘 要： | 在现代功率器件中,为了提高功率器件的击穿电压,降低导通电阻,超结结构得到广泛的应用。由于设计要求或是降低J-FET效应等原因,在功率器件的生产中,超结区中的P柱和N柱,并不能做到掺杂浓度和尺寸的完全相同。如果不对进行超结区中N柱和P柱的掺杂浓度进行修正,将会导致超结区中出现不平衡电荷,这些不平衡电荷将会严重影响超结的性能。本文提出一种对超结区内梯形PN柱掺杂浓度的修正方法,并对这种方法进行了仿真验证。
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| 关 键 词： | 超级结 功率器件 电荷平衡 MOS管 |
Simple calculation and simulation verification of super junction charge balance |
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| Wang Sen,Lu Suxian,Zhong Chuanjie,Xiang Chao. Simple calculation and simulation verification of super junction charge balance[J]. Electronic Test, 2019, 0(8): 55-56,77 |
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| Authors: | Wang Sen Lu Suxian Zhong Chuanjie Xiang Chao |
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| Affiliation: | (School of Internet of Things Engineering,Jiangnan University,Wuxi Jiangsu,214122;MechanicalIndustry Sixth Design Research Institute Co.,Ltd.,Zhengzhou Henan,450007) |
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| Abstract: | Superjunction structures have been widely used to increase the breakdown voltage of power devices and reduce the conduction resistance in modern power devices. The P column and the N column in the superjunction zone can not achieve the same doping concentration and size in the production of power devices because of the dedign requirements or the reduction of the JFET effect. If the doping concentration of the N and P columns in the superjunction is not corrected, it will appear some unbalanced charge in the superjunction, and these unbalanced charges will seriously affect the performance of the superjunction. In this paper, a method to correct the doping concentration of the trapezoidal PN column in the superjunction area is proposed and validated by simulation. |
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| Keywords: | Super junction power device charge balance MOS tube |
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