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激光分子束外延BaTiO3/SrTiO3超晶格的晶格应变研究
引用本文:姜斌,蒋书文,李燕,张鹰,李言荣.激光分子束外延BaTiO3/SrTiO3超晶格的晶格应变研究[J].真空科学与技术学报,2005,25(3):196-199.
作者姓名:姜斌  蒋书文  李燕  张鹰  李言荣
作者单位:电子科技大学微电子与固体电子学院,成都,610054
基金项目:电子科技大学校科研和教改项目
摘    要:采用脉冲激光分子束外延(PLMBE)方法,通过优化的工艺参数,在SrTiO3(100)单晶基片上外延结构为(8/8)的BaTiO3/SrTiO3超晶格薄膜.综合利用反射式高能电子衍射系统(RHEED)、高分辨率X射线衍射(HRXRD)以及高分辨率透射电镜选区电子衍射(SAED)技术,研究超晶格薄膜的晶格应变现象和规律.研究结果表明,在制备的BaTiO3/SrTiO3超晶格薄膜中,BaTiO3晶胞面外晶格增大,面内晶格减小;而SrTiO3晶胞面内及面外方向晶格都被拉伸,但面外晶格拉伸程度较大,SrTiO3晶胞产生了与BaTiO3晶胞方向一致的四方相转变.

关 键 词:晶格应变  超晶格  脉冲激光分子束外延  反射式高能电子衍射
文章编号:1672-7126(2005)03-0196-04
收稿时间:2005-01-21
修稿时间:2005年1月21日

Lattice Strains in BaTiO3/SrTiO3 Superlattice Prepared with Laser Molecular Epitaxy
Jiang Bin,Jiang Shuwen,Li Yan,Zhang Ying,LI Yanrong.Lattice Strains in BaTiO3/SrTiO3 Superlattice Prepared with Laser Molecular Epitaxy[J].JOurnal of Vacuum Science and Technology,2005,25(3):196-199.
Authors:Jiang Bin  Jiang Shuwen  Li Yan  Zhang Ying  LI Yanrong
Affiliation:School of Microelectronics and Solid-state Electronics, University of Electronic Science and Technology of China, Chengdu ,610054, China
Abstract:The high-quality BaTiO_3/SrTiO_3 superlattice with a periodicity of (8/8) structure has been prepared on SrTiO_3(100) substrate by pulsed laser molecular epitaxy under optimum parameters.The lattice strain in as-prepared BaTiO_3/SrTiO_3 superlattice was analyzed with reflective high energy electronic diffraction(RHEED),X-ray diffraction(XRD) and selective area electron diffraction(SAED).As expected,out-of-plane lattice in BaTiO_3 layer increased while in-plane lattice decreased.However,surprisingly,SrTiO_3 layer,in which out-of-plane lattice increased much more than in-plane lattice,demonstrates an out-of-plane cubic-tetragonal transition,which is consistent with that in BaTiO_3 layer.Our results are helpful to explain the polarization enhancement in BaTiO_3/SrTiO_3 superlattice.
Keywords:Lattice strain  Superlattice  Pulsed laser molecular beam epitaxy  RHEED
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