| 自写入光波导聚合物微透镜阵列的设计与制作 |
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| 引用本文： | 李凤,陈四海,赖建军,周一帆,高益庆. 自写入光波导聚合物微透镜阵列的设计与制作[J]. 中国激光, 2011, 0(3) |
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| 作者姓名： | 李凤 陈四海 赖建军 周一帆 高益庆 |
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| 作者单位： | 南京航空航天大学自动化学院;南昌航空大学测试与光电工程学院;华中科技大学光电子科学与工程学院武汉光电国家实验室; |
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| 基金项目： | 国家自然科学基金(61072131); 新世纪优秀人才计划基金(NCET-07-0319); 南昌航空大学科研基金(EC200908228)资助课题 |
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| 摘 要： | 利用聚合物SU-8光刻胶在激光作用下折射率会发生变化的特点,将其作为最后的光学材料,采用光刻胶热熔法和图形转移法,设计并制作了填充因子接近0.75、自写入光波导、六角排列的微透镜阵列。对阵列的表面形态、三维结构和光学性能分别进行了观察、测试与分析,发现用SU-8胶制作的微透镜阵列外观良好,边缘清晰;自写入光波导微透镜阵列的三维结构良好;波导末梢的光点分布均匀,光强一致性高。这种自写入光波导的微透镜阵列降低了透镜阵列与探测阵列精确装配的难度,而且其制作工艺流程简单、成本低廉、适合批量复制,这种阵列元件还有质量轻、体积小的特点,有很广的应用前景。
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| 关 键 词： | 光学器件 微光学元件 聚合物微透镜阵列 光刻胶热熔法 SU-8胶 自写入 |
Design and Fabrication of Polymer Microlens Array with Self-Written Waveguide |
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| Li Feng, Chen Sihai Lai Jianjun Zhou Yifan Gao Yiqing,College of Automation Engineering,Nanjing University of Aeronautics , Astronautics,Nanjing,Jiangsu ,ChinaWuhan National Laboratory for Optoelectronics,College of Optoelectronic Science , Engineering,Huazhong University of Science , Technology,Wuhan,Hubei ,ChinaSchool of Measuring , Optical Engineering,Nanchang Hangkong University,Nanchang,Jiangxi ,China. Design and Fabrication of Polymer Microlens Array with Self-Written Waveguide[J]. Chinese Journal of Lasers, 2011, 0(3) |
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| Authors: | Li Feng Chen Sihai Lai Jianjun Zhou Yifan Gao Yiqing College of Automation Engineering Nanjing University of Aeronautics Astronautics Nanjing Jiangsu ChinaWuhan National Laboratory for Optoelectronics College of Optoelectronic Science Engineering Huazhong University of Science Technology Wuhan Hubei ChinaSchool of Measuring Optical Engineering Nanchang Hangkong University Nanchang Jiangxi China |
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| Affiliation: | Li Feng1,3 Chen Sihai2 Lai Jianjun2 Zhou Yifan2 Gao Yiqing1,31College of Automation Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing,Jiangsu 210016,China2Wuhan National Laboratory for Optoelectronics,College of Optoelectronic Science and Engineering,Huazhong University of Science and Technology,Wuhan,Hubei 430074,China3School of Measuring and Optical Engineering,Nanchang Hangkong University,Nanchang,Jiangxi 330063,China |
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| Abstract: | Polymer microlens array with self-written waveguides is fabricated with SU-8 material which is a kind of epoxy based photoresist.Melting photoresist and image transferring are employed to fabricate the microlens array.Because of the melting and attendant expanding process of the photoresist,the actual fill factor of the array exceeds the design one,which is 0.749.SU-8 photoresist and glass substrate are separated by a layer of polydimethylsiloxane(PDMS) due to the strong bonding force between them.With the ... |
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| Keywords: | optical devices mciro-optical element polymer mcirolens array melting photoresist SU-8 photoresist self-written |
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