| 用于纳米测量的集成化单频激光干涉仪 |
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| 引用本文： | 李立艳,王坚,韩春阳,苑勇贵,吴冰,杨军,苑立波.用于纳米测量的集成化单频激光干涉仪[J].中国激光,2011(4). |
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| 作者姓名： | 李立艳 王坚 韩春阳 苑勇贵 吴冰 杨军 苑立波 |
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| 作者单位： | 哈尔滨工程大学理学院光子科学与技术研究中心; |
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| 基金项目： | 国家自然科学基金(60807032,60877046); 中央高校基础科研业务费专项基金(HEUCFZ1020); 黑龙江省自然科学基金重点项目(2D200810)资助课题 |
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| 摘 要： | 研究了一种基于偏振光的集成式单频激光干涉仪。利用偏振光学变换方法,实现了干涉仪的光学4细分结构,提高了测量灵敏度;构建4路正交探测结构,实现了干涉仪的无源偏振调制,扩大了干涉仪测量范围;采用光路集成化的设计方法,实现了一体化干涉仪光路集成。对激光干涉仪进行振动测量实验研究,结果表明,静态位移测量误差小于±0.3 nm,振动测量的分辨率达10 pm/Hz1/2;上述集成单频激光干涉仪具有测量精度高、稳定性好、动态范围宽、受环境影响小等优点,可被广泛用于纳米测量的各个领域。
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| 关 键 词： | 测量 激光干涉仪 纳米测量 差动干涉 光路集成化 |
Integration Single-Frequency Laser Interferometer Used to Nanometer Measurement |
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| Li Liyan Wang Jian Han Chunyang Yuan Yonggui Wu Bing Yang Jun Yuan Libo.Integration Single-Frequency Laser Interferometer Used to Nanometer Measurement[J].Chinese Journal of Lasers,2011(4). |
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| Authors: | Li Liyan Wang Jian Han Chunyang Yuan Yonggui Wu Bing Yang Jun Yuan Libo |
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| Affiliation: | Li Liyan Wang Jian Han Chunyang Yuan Yonggui Wu Bing Yang Jun Yuan Libo(Photonics Research Center,School of Science,Harbin Engineering University,Harbin,Heilongjiang 150001,China) |
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| Abstract: | An integrated single-frequency laser interferometer is researched based on polarized light theory.A four-subdivision configuration of the interferometer is achieved by using method of polarization states conversion which can improve the precision of the system.A four-orthogonal detection system is built up and the passive polarization modulation is accomplished which can expand the range of measurement.The integration of the interferometer is achieved by integration optical path.The vibration measurement ex... |
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| Keywords: | measurement laser interferometer nanometer measurement differential interferometry integration optical path |
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