| 无吸收模式滤波结构高亮度大功率宽条形半导体激光器 |
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| 引用本文： | 乔忠良,薄报学,高欣,张斯钰,王玉霞,芦鹏,李辉,王勇,李特,李再金,曲轶,刘国军.无吸收模式滤波结构高亮度大功率宽条形半导体激光器[J].中国激光,2011(4):13-18. |
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| 作者姓名： | 乔忠良 薄报学 高欣 张斯钰 王玉霞 芦鹏 李辉 王勇 李特 李再金 曲轶 刘国军 |
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| 作者单位： | 长春理工大学高功率半导体激光国家重点实验室; |
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| 基金项目： | 国家973计划(6135602); 武器装备基金(9140C3102071002); 吉林省科技厅项目资助课题 |
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| 摘 要： | 提升宽条形半导体激光器水平方向激射光输出的光束质量,改善宽条形半导体激光器的工作特性,一直是大功率、高亮度宽条形半导体激光器器件工艺研究的难点.基于激射光在无源波导内的衍射原理制备宽条形半导体激光器的模式滤波结构,利用AlxNy绝缘介质薄膜应力使基底半导体材料带隙变化的原理制备无吸收无源波导.将两者结合,设计制备了带有...
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| 关 键 词： | 激光器 高亮度半导体激光器 模式滤波 无吸收无源波导 AIN 应力 |
High Brightness High Power Broad Area Semiconductor Lasers with No-Absorption Mode Filter |
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| Qiao Zhongliang Bo Baoxue Gao Xin Zhang Siyu Wang Yuxia Lu PengLi Hui Wang Yong Li Te Li Zaijin Qu Yi Liu Guojun.High Brightness High Power Broad Area Semiconductor Lasers with No-Absorption Mode Filter[J].Chinese Journal of Lasers,2011(4):13-18. |
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| Authors: | Qiao Zhongliang Bo Baoxue Gao Xin Zhang Siyu Wang Yuxia Lu PengLi Hui Wang Yong Li Te Li Zaijin Qu Yi Liu Guojun |
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| Affiliation: | Qiao Zhongliang Bo Baoxue Gao Xin Zhang Siyu Wang Yuxia Lu PengLi Hui Wang Yong Li Te Li Zaijin Qu Yi Liu Guojun(State Key Laboratory on High Power Semiconductor Lasers,Changchun University of Science and Technology,Changchun,Jilin 130022,China) |
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| Abstract: | It is the most difficult point of high brightness high power semiconductor lasers to improve horizontal directional beam quality and performance characteristic of broad area laser diodes(LDs).According to diffraction losses characteristic of those different modes,lasing light propagates in the passive waveguide of broad area semiconductor laser.And AlxNy dielectric film stress is used to prepare no-absorption passive waveguide by changing base band gap of semiconductor materials.Combining both the principle... |
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| Keywords: | lasers high brightness semiconductor lasers mode filter no-absorption passive waveguide AlN stress |
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