超声波清洗在替代ODS清洗工艺技术中的独特作用

文章通过分析超声清洗技术的原理、特点及其所具有的环保优势，并将超声清洗技术与其它清洗技术进行对比，阐述了超声波清洗在替代ODS清洗工艺技术中的独特作用；通过分析影响超声清洗效果的主要因素，如超声的声强、频率和声场分布，清洗液的粘滞系数、表面张力和流动性，清洗介质的理化性质与清洗能力等，提出了确定超声空化强度和选择清洗介质的基本原则；介绍了超声清洗方式的分类与选择，以及用超声清洗技术替代ODS清洗技术时应该注意的一些问题，指出大功率超声参量与清洗介质物理化学性能参量之间的相互作用对清洗效果有着重要的影响。

Specific action of ultrasonic cleaning for replacing ODS cleaning technology

The specific action of ultrasonic cleaning on replacing ODS cleaning technology was expounded in this paper by analyzing the principle and the feature of ultrasonic cleaning and the advantage it has in environmental protection and by comparing the ultrasonic cleaning with others. The principle for selecting ultrasonic cavitation intensity and the cleaning agents was put forward by analyzing the main factors that affect ultrasonic cleaning quality, such as the sound intensity and the frequency of ultrasound, the sound field distribution, the viscidity factor and the surface tension and the fluidity of cleaning liquid, the physical chemistry nature and the cleaning capability of cleaning agent, and so on. It introduced the classifications of ultrasonic cleaning and presented some problems should be paid attention to in the replacement. It also pointed out that the interaction between the high power ultrasound parameter and the characteristic parameter of cleaning agent influence the cleaning quality distinctly.