一种小型化纳米级单光栅位移测量系统的研制

随着纳米技术的广泛应用以及人们对纳米位移测量认识的不断深化，光栅位移测量技术正在受到广泛的关注。在研究反射式光栅位移测量原理的基础上，设计并实现了一种小型化纳米级单光栅位移测量系统，对系统总体设计、光路布局以及软件算法进行了阐述，最后，利用电容位移传感器ASP-10-ILA等辅助仪器进行了对比实验。实验结果表明:在两路信号不完全正交的情况下系统也能实现准确测量，且理论上系统的位移测量分辨率达到1 nm；在电容位移传感器的量程范围内进行小位移对比试验，系统测量均值与参考值最大偏差118 nm，且与拟合直线偏差均小于100 nm；当光栅发生10 mm以上的较大位移时，测量结果与均值的偏差均小于5 ppm。

Design of a miniature single-grating displacement measuring system with nanometer resolution

As the extensive application of nanotechnology and the deepened cognition of nanometer measurement, the measuring technologies of displacement with nanometer resolution were paid extensively attention to. On the basis of researching in working principle of the reflex-grating measurement, a miniature single-grating displacement measuring system with nanometer resolution was designed as well as realized. The overall design, optical structure, and software algorithm of the system were elaborated. In the end, comparative experiments were done with the help of auxiliary instruments which mainly included a capacitive displacement sensor named ASP-10-ILA. Experimental results show that the system can measure accurately when the two signals are not absolutely orthogonal, and the resolution of the system is 1 nm theoretically; the mean values of the measuring system deviates from the reference values by a maximum of 118 nm, and deviates from the fitting-line by no more than 100 nm when the grating displacement experiments are done within the range of capacitive displacement sensor; the deviations of the results are less than 5 ppm when the grating has displacement larger than 10 mm.