| ZnO纳米线阵列湿度传感器研究 |
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| 引用本文： | 顾磊磊,郑凯波,孙大林,莫晓亮,陈国荣.ZnO纳米线阵列湿度传感器研究[J].真空科学与技术学报,2011,31(3):352-356. |
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| 作者姓名： | 顾磊磊 郑凯波 孙大林 莫晓亮 陈国荣 |
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| 作者单位： | 复旦大学材料科学系,上海,200433 |
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| 基金项目： | 国家自然科学基金，上海市科学技术发展基金，上海市教育委员会科研创新项目，教育部留学回国人员科研启动基金资助项目 |
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| 摘 要： | 采用水热法在Au/Ni叉指电极上原位生长出整齐的ZnO纳米线阵列。纳米线的平均直径和长度分别为50 nm和5μm,且沿0001]方向高度择优生长。测试了基于纳米线阵列的湿敏器件对不同湿度电容和电阻响应,并分析了它的工作机制。实验结果表明,这些器件具有相对较大的灵敏度和较短的响应和恢复时间,从而说明ZnO纳米线阵列在湿敏领域有很好的应用前景。
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| 关 键 词： | ZnO纳米线阵列 湿度传感器 电容 电阻 |
Characterization of Highly-Aligned ZnO Nanowire Arrays and Its Application in Humidity Sensors |
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| Gu Leilei,Zheng Kaibo,Sun Dalin,Mo Xiaoliang,Chen Guorong.Characterization of Highly-Aligned ZnO Nanowire Arrays and Its Application in Humidity Sensors[J].JOurnal of Vacuum Science and Technology,2011,31(3):352-356. |
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| Authors: | Gu Leilei Zheng Kaibo Sun Dalin Mo Xiaoliang Chen Guorong |
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| Affiliation: | Gu Leilei,Zheng Kaibo,Sun Dalin,Mo Xiaoliang,Chen Guorong (Department of Materials Science,Fudan University,Shanghai 200433,China) |
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| Abstract: | The highly-aligned ZnO nanowire arrays with c-axis preferred growth orientation along were fabricated in-situ by hydrothermal synthesis on the prefabricated,Au/Ni interdigitated electrodes.The impacts of the array fabrication conditions on microstructures of ZnO nanowires,and on configuration of the array were studied with X-ray diffraction,scanning electron microscopy,and high resolution transmission electron microscopy.The relationship between the relative humidity and its electrical properties was also e... |
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| Keywords: | ZnO nanowire array Humidity sensors Capacitance Conductance |
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