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Bidirectional and location-dependent frequency tuning of single crystal 4H-SiC micromechanical cantilevers |
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| Authors: | Feng Zhao Zhibang Chen |
| Affiliation: | 1. Micro/Nanoelectronics and Energy Laboratory, Department of Electrical Engineering, School of Engineering and Computer Science, Washington State University, Vancouver, WA, 98686, USA |
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