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Influence of grains and surface roughness in boron and phosphorus implanted LPCVD polycrystalline silicon thin film |
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| Authors: | Kulwant Singh Sanjeev Kumar Robin Joyce Rajesh Saha Soney Varghese Jamil Akhtar |
| Affiliation: | 1. Nanomaterials and Device Research Laboratory, School of Nano Science and Technology, National Institute of Technology Calicut, Kerala, India 2. Sensors and Nanotechnology Group, CSIR-CEERI, Pilani, Rajasthan, India |
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