Monte Carlo analysis of the detection of clay occlusion of respirable quartz particles using multiple voltage scanning electron microscopy

The electron incident-energy dependence of the relative intensities of Al and Si x-rays produced in a respirable-sized quartz particle by scanning electron microscopy is sensitive to the inhomogeneity of the distribution of Al and Si in the particle. Realistic Monte Carlo calculations of this energy dependence validate the proposal to use this effect for the detection of particles in which an aluminosilicate coating occludes the surface of a silica core.