Determination of the diameter of the electron probe of a scanning electron microscope

A technique is proposed for determining the diameter of electron probes used in modern scanning electron microscopes within 1-nm error limits by means of a linear gauge. The gauge is designed for the calibration of such microprobes and represents a relief structure in the form of slotted grooves in silicon with a nearly rectangular profile.Translated from Izmeritell'naaya Tekhnika, No. 12, pp. 24–25, December, 1993.