Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications |
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Authors: | Verd J Uranga A Teva J Lopez JL Torres F Esteve J Abadal G Perez-Murano F Barniol N |
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Affiliation: | Univ. Autonoma de Barcelona, Spain; |
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Abstract: | A bridge-shaped first-lateral-mode 60-MHz mechanical resonator, which is monolithically integrated with capacitive CMOS readout electronics, is presented. The resonator is fabricated directly on a commercial CMOS technology using the top metal level as a structural layer. A maskless single-step wet-etching process for mechanical structure release after the standard CMOS integration process is the only postfabrication requirement. Electrical characterization of the electromechanical device demonstrates the feasibility of implementing a CMOS-microelectromechanical system for high-frequency applications using a standard conventional CMOS technology. |
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