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Bubbles in SiC crystals formed by helium ion irradiation at high temperatures |
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| Authors: | K Hojou and K Izui |
| Affiliation: | Department of Chemistry, Japan Atomic Energy Research Institute, Tokai-mura, Ibaraki 319-11, Japan |
| Abstract: | Helium bubbles were found to be formed in SiC crystals by irradiation with He+ ions at 1000 to 1200° C. The size of bubbles increased with increasing irradiation temperatures. The density of helium atoms in the bubbles was measured to be about 1028 atoms/m3 by EELS measurement in combination with electron microscopic observation in the same selected areas, and the internal pressure of the bubbles was estimated therefrom to be on the order of 108 Pa at room temperature. |
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