Sparkless discharge in dense gases with preionization by a low-energy electron beam of a barrier open discharge

A highly stable sparkless discharge can be obtained using preionization by an electron beam, photons, and plasma electrons formed in a barrier open discharge, for which a grid electrode (that also serves as a cathode for the main discharge) is situated immediately on a dielectric-coated electrode surface. In the standard gas mixture for an ArF laser at a pressure of 2.5 bar, an energy deposition of 2.5 J/cm³ in a 12-ns pulse at a specific power of 210 MW/cm³ was achieved. The results are of interest for the development of technological excimer lasers operating at a high pulse repetition rate.