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Ion implanted GaAs bipolar transistors
Authors:Yuan   H.T. Doerbeck   F.H. McLevige   W.V.
Affiliation:Texas Instruments Incorporated, Dallas, USA;
Abstract:GaAs n-p-n bipolar transistors were fabricated by ion implanting Be and Se into bulk n-type substrate material. Devices with mesa collectors exhibit a d.c. current gain hFE ? 8 and a reverse bias leakage current of less than 10 nA.
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