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Wafer level hermetic packaging based on Cu-Sn isothermal solidification technology
Authors:Cao Yuhan    Luo Le
Affiliation:State Key Laboratories of Transducer Technology;Shanghai Institute of Microsystem and Information Technology;Chinese Academy of Sciences;Shanghai 200050;China
Abstract:wafer level package Cu-Sn isothermal solidification technology hermeticity
Keywords:wafer level package  Cu-Sn isothermal solidification technology  hermeticity  
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