Distribution and generation of traps in SiO2/Al2O3 gate stacks |
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| Authors: | Isodiana Crupi Robin Degraeve Bogdan Govoreanu David P. Brunco Philippe Roussel Jan Van Houdt |
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| Affiliation: | aMATIS CNR-INFM, Catania, Italy;bIMEC, B-3001 Leuven, Belgium;cIntel Assignee at IMEC, B-3001 Leuven, Belgium |
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| Abstract: | In this work we combine charge-pumping measurements with positive constant voltage stress to investigate trap generation in SiO2/Al2O3 n-MOSFET. Trap density has been scanned either in energy or in position based on charge-pumping (CP) measurements performed under different operating conditions in terms of amplitude and frequency of the gate pulse. Our results have revealed that the traps are meanly localized shallow in energy level, deeper in spatial position and they are mostly generated near the Si/SiO2 interface. |
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