| 激光技术在半导体行业中的应用 |
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| 引用本文： | 杨洪星,刘晓伟,陈亚楠,武永超,赵权. 激光技术在半导体行业中的应用[J]. 电子工业专用设备, 2010, 39(2): 10-13 |
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| 作者姓名： | 杨洪星 刘晓伟 陈亚楠 武永超 赵权 |
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| 作者单位： | 中国电子科技集团公司第四十六研究所,天津,300220 |
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| 摘 要： | 激光技术自诞生以来,受到了广泛地关注,并逐步拓展了其应用领域。对激光技术在晶片/芯片加工领域的应用、激光打标技术、激光测试技术以及激光脉冲退火技术(LSA)进行简要的介绍。
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| 关 键 词： | 激光 激光打标 激光测试 脉冲退火技术 |
Application of Laser Technology in Semiconductor Industry |
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| YANG Hongxing,LIU Xiaowei,CHEN Yanan,WU Yongchao,ZHAO Quan. Application of Laser Technology in Semiconductor Industry[J]. Equipment for Electronic Products Marufacturing, 2010, 39(2): 10-13 |
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| Authors: | YANG Hongxing LIU Xiaowei CHEN Yanan WU Yongchao ZHAO Quan |
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| Affiliation: | The 46th Research Institute;CETC;Tianjin 300220;China |
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| Abstract: | Laser Technology had been paid attention widely since it was developed. The article was addressed on application of laser technology in semiconductor. It was introduced that laser mark technology, laser slicing technology, laser scalpeling gound technology, and laser signal annealing technology. |
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| Keywords: | laser laser mark laser measurement laser signal annealling |
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