Tunable, oblique incidence resonant grating filter for telecommunications

We have designed a tunable, oblique-incidence resonant grating filter that covers the C band as an add-drop device for incident TE-polarized light. We tune the filter by tilting a microelectromechanical systems platform onto which the filter is attached. The fabrication tolerances as well as the role of finite incident-beam size and limited device size were addressed. The maximum achievable efficiency of a finite-area device as well as a scaling law that relates the resonance peak width and the minimum device size is derived. In good agreement with simulations, measurements indicate a negligible change in shape of the resonance peak from 1526 nm at a 45 degrees angle of incidence to 1573 nm at a 53 degrees angle with a full width at half-maximum of 0.4 nm. In this range the shift of the peak wavelength is linear with respect to changes in the angle of incidence.