| ICF靶丸表面形貌检测系统性能分析 |
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| 引用本文： | 高党忠,马小军,赵学森. ICF靶丸表面形貌检测系统性能分析[J]. 光学仪器, 2009, 31(4): 12-16 |
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| 作者姓名： | 高党忠 马小军 赵学森 |
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| 作者单位： | 中国工程物理研究院,激光聚变研究中心,四川,绵阳,621900;中国工程物理研究院,激光聚变研究中心,四川,绵阳,621900;中国工程物理研究院,激光聚变研究中心,四川,绵阳,621900 |
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| 基金项目： | 国家863计划资助项目 |
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| 摘 要： | 基于原子力显微镜与精密的气浮轴系，建立了靶丸表面形貌检测系统。对该系统的各项性能指标进行了评定，研究结果表明，系统的随机噪声误差在10nm量级，轴系的回转精度误差功率谱振幅在10^-2量级，与微球轮廓功率谱幅度相差两个量级以上，系统的稳定性较好，波长为几百纳米以上的局部颗粒能够被精确分辨。
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| 关 键 词： | 原子力显微镜 靶丸表面形貌 模数 功率谱 |
Performance research of ICF target sphere surface profiler |
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| GAO Dangzhong,MA Xiaojun,ZHAO Xuesen. Performance research of ICF target sphere surface profiler[J]. Optical Instruments, 2009, 31(4): 12-16 |
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| Authors: | GAO Dangzhong MA Xiaojun ZHAO Xuesen |
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| Affiliation: | (Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China) |
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| Abstract: | Based on a reconstructed atomic force microscope(AFM)combined with the precision rotating air-bearing,the measure instrument used for characterization of target sphere surface is established.The systematic performance is analyzed and the experiment results show that the random noise of system is about 10nm,the power spectrum of rotary precision error of air-bearing was 10-2 and less than 2 order of magnitude compared with power spectrum of target sphere surface profile.The system was stabile and defect with hundreds nanometer wavelength on target sphere surface can be detected obvious. |
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| Keywords: | atomic force microscope(AFM) target sphere surface profile mode number power spectrum |
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