K波段宽带声体波延迟线的设计与优化

通过优化K波段声体波换能器设计,突破200 nm极薄压电薄膜制备和微带线匹配等技术,研制了K波段体声波延迟线样品。研究结果表明,样品的中心频率大于23 GHz,带宽大于1 000 MHz,延迟时间295 ns,外形尺寸约25 mm×16 mm×14 mm,是目前国内外已报道的工作频率最高的声体波延迟线。

Design and Optimization of KBand Wide Bandwidth Bulk Acoustic Wave Delay Line

By optimizing the design of Kband bulk acoustic wave transducer, and breaking through the 200 nm ultrathin piezoelectric film deposition and microstrip line matching technologies, a prototype of bulk acoustic wave delay line operating at Kband has been developed in this work. The research results show that the center frequency of the prototype is greater than 23 GHz, the bandwidth is greater than 1 000 MHz, the delay time is 295 ns and the overall size is about 25 mm×16 mm×14 mm. The bulk acoustic wave delay line has the highest operating frequency reported at home and abroad.