高精度倾角传感器工艺改进设计及验证

为解决基于石英材料研制的电容型倾角传感器生产过程中部分产品在振动情况下，出现明显的零位偏移现象，造成产品不合格的问题，对其工艺进行改进设计。分析传感器原理，建立故障树模型，确定产生倾角传感器零位偏移的原因，定位使敏感组件的相对位置在振动条件下出现位移的工艺流程环节，重新设计装配夹具，引入数字化压力监测系统，优化和完善装配工艺流程。生产及试验结果表明，该设计能消除零位偏移现象，故障定位准确，工艺改进设计合理。

Process Improvement Design and Verification of High Precision Angular Sensor

The Angle-sensor is a capacitive sensor based on quartz material. In the production process, some products appear obvious zero offset phenomenon under vibration condition. It causes the product to be unqualified, therefore carries on the improvement design to its craft. By analyzing the working principle of the Angle-sensor, the fault tree model was established, and the cause of the product failure was determined. The displacement of the sensitive component inside the sensor occurs after vibration, which results in the change of the detection capacitance, which leads to the deviation of the zero position output of the sensor. So the process has been perfected design, the product assembly fixture has been redesigned, the digital pressure monitoring system has been introduced, and the assembly process has been optimized. After sensor production and test verification, the zero offset fault of the product disappeared, verified that the fault location is accurate, the new process improvement design is reasonable, at present, the new process has been applied in production.